Positive Displacement Blowers
Vacuum Blower
Canned Motor Blower - Series HM
AERZEN canned motor vacuum blowers are a type of positive displacement blower that comes with a hermetically sealed drive ideal for the conveyance of aggressive and neutral gases. These vacuum systems are useful in industrial high vacuum technology due to their high power, reliability, and efficiencies.
Volume flow:
406
to
15.570
m3/h
Vacuum:
10^-5
to
0
mbar
Medium:
Air,
Neutral Gases,
Aggressive Gases
Conveying:
Oil-free
The advantages of AERZEN Canned Motor Blowers at a glance:
- Excellent variety with four motor variants
- Highly flexible vacuum components with vertical and horizontal direction of flow
- High mechanical strength pumps (up to 230 mbar in case of HM)
- Low nitrogen and water consumption
- Reduced pumping down times
Neutral or aggressive gases? AERZEN offers solutions for both!
AERZEN vacuum blowers with hermetically sealed drive (HM) are designed for conveying neutral and aggressive gases and find special application in industrial high vacuum technology. Vacuum blowers always work in combination with a backing pump*.
This backing pump starts operating at atmosphere. The vacuum pumps is connected typically at approx. 50 to 200 mbar and the pump down process begins. Depending on the application, liquid ring pumps, sliding vane rotary vacuum pumps or screw vacuum pumps are used as the backing pump. When supplied with AERZEN frequency converters and special parameter sets, operation with the backing pump starting from atmospheric pressure is also possible.
Applications
- Semiconductor industry
- Micro-electronics
- Production of flat screens
- Laser technology
- Solar technology
- Helium leak indicating units
- Chemical process technology
- Foil and glass coating
- Manufacture of melting furnaces
- Evacuation of hydrogen
*An additional backing pump (HM drive) is always required when using an AERZEN vacuum blower with canned drive.
US Units
No- Type of technology
- Positive Displacement Blowers
- Vacuum
- 10^-5 to 0 mbar
- Volume flow
- 406 to 15.570 m3/h
- Medium
- Air, Neutral Gases, Aggressive Gases
- Conveying
- Oil-free
Positive displacement blower for industrial high vacuum technology
AERZEN vacuum blowers with hermetically sealed drive (HM) are designed for conveying neutral and aggressive gases and are used in industrial high vacuum technology. Convincing efficiencies and high reliability characterise this series.
HM version for neutral and aggressive gases:
With 10 sizes of type HM, AERZEN also covers the theoretical intake volume flow from 406 m³/h to 15,570 m³/h. The advantages at a glance:
- Optimal selection possibilities by 4 motor variants
- High consequently considerable reduction of pumping down times
- Suitable for application under clean room conditions
- Large control range by means of frequency converter with proven parameters tuned to the AERZEN vacuum pumps
- Vertical and horizontal direction of flow possible
The reason why manufacturing processes are optimised by a high delta p.
AERZEN Vacuum pumps with HM drive significantly reduce pump down time, which leads to an increase of the output ratio in production. This is a big step towards process optimisation.
Design and construction
AERZEN Vacuum pumps with HM drive are provided with O-ring seals at the casing flanges. Further important advantages of the blower stage are vacuum tightness and air cooling. Lubrication oil is supplied by splash lubrication. Mineral oil can be used as a lubricant, as well as the PFPE oil, generally used in semiconductor technology. This vacuum pumps are equipped with a special rectangular ring-labyrinth-seal between the conveying chamber and the bearing chamber. Additionally, an amply dimensioned neutral chamber with condensate channels is installed. Optionally, the neutral chamber can be purged with seal gas, in order to achieve an increased sealing effect. The hermetically sealed drive ensures the sealing of the drive shaft. A shaft passage to atmosphere can therefore be omitted, making it technically possible to achieve significantly higher rotation speeds.
